In recent past, research has been broadly based on controlling matter at nanometer scale, and this idea led to the development of new materials with unique and useful properties. Thus, the implementation of new technology has so far made possible many small-scale power electronic circuits and elements, which are widely being used, in various commercial applications. Nano power electronics is a developing field, where the circuitry is composed of molecular dimensional power electronic components, which includes all types of power switches and devices. The area of nano power electronics have recently been the most intensive area of concentration for researchers of all fields like material science, biotechnology, physics, chemistry, and all engineering fields. Nano scale electronics would define the latest advancements in the solid-state device technology; to make nanometer dimensional FET and MOSFET switches operate for molecular scale circuits and devices. Micro and nano scale electromechanical systems which function with many nano scale elements inbuilt within them, are very useful for different purposes in medical science and many other areas.