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3 June 2005 A comparative study of channel formation in polymer materials using VUV and UV nano-second laser sources for use in micro-fluidic applications
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Abstract
UV and VUV laser ablation of micro-fluidic circuits for micro-total analysis systems (μTAS) is an alternative to more expensive techniques of LIGA or micro-moulding. The machining of trenches in PS, PC, PMMA (CQ grade and non-CQ grade) was investigated using two Q-switched solid state lasers, one operating at 266nm (fourth harmonic) and another at 355nm (third harmonic). These results were compared with results achieved using a 193nm Excimer laser. The structuring of the channels depends on both the laser wavelength and the target material. A comparison of the process will be presented with respect to the structure quality and efficiency of the process.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sean McGinty, Gerard M. O'Connor, and Thomas J. Glynn "A comparative study of channel formation in polymer materials using VUV and UV nano-second laser sources for use in micro-fluidic applications", Proc. SPIE 5825, Opto-Ireland 2005: Optoelectronics, Photonic Devices, and Optical Networks, (3 June 2005); https://doi.org/10.1117/12.605144
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