Quasi-optical beam steering using a MEMS reflector array

V. Srigengan; S. J. N. Mitchell; V. F. Fusco; D. H. Campbell; D. Linton; H. S. Gamble

doi:10.1117/12.604828

3 June 2005 Quasi-optical beam steering using a MEMS reflector array

V. Srigengan, S. J. N. Mitchell, V. F. Fusco, D. H. Campbell, D. Linton, H. S. Gamble

Proceedings Volume 5825, Opto-Ireland 2005: Optoelectronics, Photonic Devices, and Optical Networks; (2005) https://doi.org/10.1117/12.604828
Event: OPTO-Ireland, 2005, Dublin, Ireland

Abstract

In applications such as target tracking the ability to steer the radiation pattern from an antenna array is required. This paper details the theory, design, fabrication and characterisation of a new type of reconfigurable planar antenna reflectarray for operation with circularly polarised signals. Each element in the array comprises a resonant dipole antenna that can be rotated about its axis, each element is positioned at an odd number of quarter wavelengths above a ground plane. An array of fixed antennas was fabricated on a high resistivity silicon substrate with measurements confirming that the silicon exhibits low absorption at quasi-optical frequencies. The demonstrator devices are designed for 100 GHz operation in order to facilitate fabrication of a usable array aperture on a single silicon wafer. Dimensions of the antennae and the thickness of the substrate were selected accordingly. The wide range of micro-machining techniques that are available for silicon based structures enabled the design of a demonstrator array where the elements can be rotated using a rack and pinion arrangement. In such structures, the actuating mechanism is positioned outside the radiating aperture of the array to exclude conducting elements that would otherwise impair antenna functionality. A method of fabricating the reconfigurable array has been developed and successfully implemented.

Citation Download Citation

V. Srigengan, S. J. N. Mitchell, V. F. Fusco, D. H. Campbell, D. Linton, and H. S. Gamble "Quasi-optical beam steering using a MEMS reflector array", Proc. SPIE 5825, Opto-Ireland 2005: Optoelectronics, Photonic Devices, and Optical Networks, (3 June 2005); https://doi.org/10.1117/12.604828

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KEYWORDS

Silicon

Antennas

Semiconducting wafers

Oxides

Reflectors

Electromagnetic radiation

Microelectromechanical systems

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