8 June 2005 Cumulative damage effects in different machining strategies for 2.5D laser micro structuring of polyimide
Author Affiliations +
Polymers play an important role in many applications such as microelectronics and medical devices. Micro-channels and shaped holes can be produced by 2.5D micro-structuring with excimer laser sources using mask projection. The industrial cost associated with these processes can be greatly reduced by the use of solid-state lasers due to their lower cost and maintenance. For this purpose, we investigate the interaction of polyimide (Kapton) with solid-state lasers emitting in the UV (266 & 355 nm) spectral range. The study presents a comparison of the ablation profiles obtained for different laser sources and these are discussed in term of roughness and efficiency. Limitations on the actual motion system (scan-head) are evident and the need to control the material removed by a small Gaussian beam in terms of overlapping for the direct writing process will be highlighted.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
D. Ilie, D. Ilie, C. Mullan, C. Mullan, Sebastian Favre, Sebastian Favre, Gerared M. O'Connor, Gerared M. O'Connor, Thomas J. Glynn, Thomas J. Glynn, } "Cumulative damage effects in different machining strategies for 2.5D laser micro structuring of polyimide", Proc. SPIE 5827, Opto-Ireland 2005: Photonic Engineering, (8 June 2005); doi: 10.1117/12.605153; https://doi.org/10.1117/12.605153


SMI a new method to allow low cost, high...
Proceedings of SPIE (June 30 2015)
Mid-ultraviolet pulsed laser micromachining of SiC
Proceedings of SPIE (November 17 2014)
Microprocessing by UV laser
Proceedings of SPIE (September 11 2002)

Back to Top