29 April 2005 Molecular dynamics study of surface erosion and defect generation in copper under cluster bombardment: influence of projectile mass and energy
Author Affiliations +
Proceedings Volume 5831, Eighth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering; (2005) https://doi.org/10.1117/12.619507
Event: Eighth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, 2004, St. Petersburg, Russian Federation
Abstract
Using classical Molecular Dynamics (MD) method we study surface erosion, primary defect production and sputtering processes occurring in crystalline Cu target with (111) surface plane under irradiation with CuN and AuN monomers and polyatomic clusters (N = 1-55) with incident energies E/N = (100-1000) eV per one incident atom. Non additive effects in both sputtering and defect production were observed in case of cluster impact above a certain threshold cluster size (Nth) which depends on both incident energy and mass of the projectile. The relative efficiency of sputtering (rescaled per one incident atom) is found to be about of factor of two larger then corresponding efficiency of damage production. It was demonstrated that most typical kinds of damage produced inside the target after projectile impact are vacancies and vacancy clusters, and their number significantly prevails over number of interstitials. Moreover, the fraction of interstitial atoms reduces strongly with increase of cluster size N at a given energy per one incident atom. This fact can be explained taking into consideration high mobility of interstitial atoms, which result in formation of ad-atom conglomerates on the surface. Impact of a cluser with N ≥ 6 and with total incident energy above some threshold value (about 5 keV) results in formation of pronounced microcrater surrounded by ad-atom rim, whereas below this energy threshold, typical topographic features of the impact region is either ad-atoms hillocks or shallow crater.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Anton S. Kolesnikov, Evgeni E. Zhurkin, "Molecular dynamics study of surface erosion and defect generation in copper under cluster bombardment: influence of projectile mass and energy", Proc. SPIE 5831, Eighth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, (29 April 2005); doi: 10.1117/12.619507; https://doi.org/10.1117/12.619507
PROCEEDINGS
11 PAGES


SHARE
RELATED CONTENT

Contamination removal by ion sputtering
Proceedings of SPIE (November 01 1990)
Ion-assist applications of broad-beam ion sources
Proceedings of SPIE (September 29 2004)
Creating nanohole arrays with the helium ion microscope
Proceedings of SPIE (June 01 2011)
Advances of focused ion beam in micromachining technology
Proceedings of SPIE (November 19 2007)

Back to Top