Adsorption induced differential surface stress versus adsorption induced resonance frequency change: a comparison

J. Amirola; A. Rodriguez; L. Castaner; J. Lozano; F. J. Gutierrez; M. C. Horrillo

doi:10.1117/12.608265

1 July 2005 Adsorption induced differential surface stress versus adsorption induced resonance frequency change: a comparison

J. Amirola, A. Rodriguez, L. Castaner, J. Lozano, F. J. Gutierrez, M. C. Horrillo

Author Affiliations +

Proceedings Volume 5836, Smart Sensors, Actuators, and MEMS II; (2005) https://doi.org/10.1117/12.608265
Event: Microtechnologies for the New Millennium 2005, 2005, Sevilla, Spain

Abstract

In order to compare their gas sensing properties two kinds of sensors based on silicon cantilevers of similar characteristics have been fabricated: On one side we fabricated gravimetric gas sensors based on silicon cantilevers acting as resonators. The active layers consisted of polymer films deposited on top of the cantilevers. Sensors were maintained oscillating at their natural resonance frequency with electronic circuitry also developed in this work. Basically they consist of mass-spring mechanical resonators in which the mass increment due to gas sorption in the polymer provokes a shift on the resonance frequency. The output signal is a sinusoidal voltage extracted directly from the oscillator, and the amount of gas absorbed is related to the frequency of this output signal. The second type of sensors consisted of capacitors in which one electrode is a silicon cantilever and the other is a fixed metallic electrode fabricated parallel to the silicon cantilever. The silicon cantilever of these devices is covered with the same polymer films as for the resonators. The sensing principle in this case relies on the bending produced by the internal mechanical stress induced by the absorption of the gas in the polymeric layer. In these devices the signal is obtained by measuring the capacitance between the two plates of the capacitor, in this case the out coming signal was the current of the capacitor: an amplitude modulated signal. The gas response of both types of sensors have been characterized and a comparison is presented in this paper.

Citation Download Citation

J. Amirola, A. Rodriguez, L. Castaner, J. Lozano, F. J. Gutierrez, and M. C. Horrillo "Adsorption induced differential surface stress versus adsorption induced resonance frequency change: a comparison", Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); https://doi.org/10.1117/12.608265

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KEYWORDS

Sensors

Resonators

Silicon

Polymers

Gas sensors

Capacitance

Adsorption

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