1 July 2005 Advanced optical metrology aimed at part inspection and reverse engineering for Mems and Nems
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Abstract
The aim of this article is to illustrate the need for reverse engineering in order to manufacture parts for Micro- and Nano- electromechanical systems, specially in the medical field. Afterwards, an overview of the newest optical devices for production metrology and quality control of Mems & Nems is provided. Finally, a new concept for a modular optical-system able to digitalise micro-parts is presented. The system is proposed for scanning measurement of topographies and digitalising of complete geometries. The system is able to generate a parametric 3D database that can be used for tooling or design modifications. The resulting data can also be used to generate a colour map comparison report. This paper ends with conclusions and an overview of the future in metrology for Mems & Nems.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tilo Pfeifer, Robert Schmitt, Ubaldo Aleriano, "Advanced optical metrology aimed at part inspection and reverse engineering for Mems and Nems", Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); doi: 10.1117/12.608980; https://doi.org/10.1117/12.608980
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