1 July 2005 Advanced optical metrology aimed at part inspection and reverse engineering for Mems and Nems
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Abstract
The aim of this article is to illustrate the need for reverse engineering in order to manufacture parts for Micro- and Nano- electromechanical systems, specially in the medical field. Afterwards, an overview of the newest optical devices for production metrology and quality control of Mems & Nems is provided. Finally, a new concept for a modular optical-system able to digitalise micro-parts is presented. The system is proposed for scanning measurement of topographies and digitalising of complete geometries. The system is able to generate a parametric 3D database that can be used for tooling or design modifications. The resulting data can also be used to generate a colour map comparison report. This paper ends with conclusions and an overview of the future in metrology for Mems & Nems.
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Tilo Pfeifer, Tilo Pfeifer, Robert Schmitt, Robert Schmitt, Ubaldo Aleriano, Ubaldo Aleriano, } "Advanced optical metrology aimed at part inspection and reverse engineering for Mems and Nems", Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); doi: 10.1117/12.608980; https://doi.org/10.1117/12.608980
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