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1 July 2005 Design of infrared wavelength-selective microbolometers using planar multimode detectors
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Proceedings Volume 5836, Smart Sensors, Actuators, and MEMS II; (2005) https://doi.org/10.1117/12.608698
Event: Microtechnologies for the New Millennium 2005, 2005, Sevilla, Spain
Abstract
Multimode microbolometers for wavelength-selective infrared detection have been designed using a Genetic Algorithm and an electromagnetic model of the planar antenna. Wavelength selectivity can be varied by changing the distance to a tuning mirror, or by changing only lithographically drawn parameters, with bandwidth narrower than Fabry-Perot microbolometers. The design of a three color system covering the 7-14 micron band is presented.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sang-Wook Han and Dean P. Neikirk "Design of infrared wavelength-selective microbolometers using planar multimode detectors", Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); https://doi.org/10.1117/12.608698
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