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1 July 2005 Efficient topology and design methodology for RF MEMS switches
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Proceedings Volume 5836, Smart Sensors, Actuators, and MEMS II; (2005) https://doi.org/10.1117/12.609396
Event: Microtechnologies for the New Millennium 2005, 2005, Sevilla, Spain
Abstract
We present an original RF-MEMS switch topology associated with an efficient design methodology. The proposed switch has been optimized thank to a scalable electrical model, fabricated and measured and exhibits isolations better than -23 dB and losses less than 0.25 dB at 24 GHz for a pull down voltage of 22V. The proposed topology and design methodology can then be efficiently used to optimize more complex RF-MEMS with enhanced microwave performances.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
B. Ducarouge, D. Dubuc, S. Melle, K. Grenier, L. Mazenq, L. Bary, and R. Plana "Efficient topology and design methodology for RF MEMS switches", Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); https://doi.org/10.1117/12.609396
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