1 July 2005 Large-signal model of a resonating cantilever-based transducer for system level electrical simulation
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Abstract
In this work, we present a non-linear electromechanical model of an electrostatically excited cantilever that can be used to perform system level electrical simulations. This model is implemented by using an analog hardware description language (VHDL-AMS) that allows its use in a common IC CAD environment like CADENCE. Small-signal and large-signal simulations are performed and the results are compared with a simple linear model (RLC//C) showing the benefits of this model. This model is validated by its fit with the experimental results obtained from a monolithic sub-micrometer cantilever based sensor
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Jaume Verd, Jordi Teva, Gabriel Abadal, Francesc Perez-Murano, Jaume Esteve, Nuria Barniol, "Large-signal model of a resonating cantilever-based transducer for system level electrical simulation", Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); doi: 10.1117/12.608462; https://doi.org/10.1117/12.608462
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KEYWORDS
Solid modeling

Microelectromechanical systems

Computer aided design

Data modeling

Device simulation

Systems modeling

Sensors

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