Microhotplate-based silicon gas sensor arrays with linear temperature gradient for wine quality monitoring

Andrea Adami; Leandro Lorenzelli; Vittorio Guarnieri; Mario Zen; Luca Francioso; Pietro Siciliano; A. Forleo; A. M. Taurino; Giuseppe Agnusdei

doi:10.1117/12.608246

1 July 2005 Microhotplate-based silicon gas sensor arrays with linear temperature gradient for wine quality monitoring

Andrea Adami, Leandro Lorenzelli, Vittorio Guarnieri, Mario Zen, Luca Francioso, Pietro Siciliano, A. Forleo, A. M. Taurino, Giuseppe Agnusdei

Author Affiliations +

Proceedings Volume 5836, Smart Sensors, Actuators, and MEMS II; (2005) https://doi.org/10.1117/12.608246
Event: Microtechnologies for the New Millennium 2005, 2005, Sevilla, Spain

Abstract

In this work, we describe the design implementation, validated by experimental results, of an innovative gas sensor array for wine quality monitoring. The main innovation of this integrated array deals with the simultaneous outputs, from a single chip on TO-12 socket, of 8 different signals coming from a WO3 thin film structure heated in a linear temperature gradient mode, allowing an overall evaluation of gas sensing properties of the material in a 100°C-wide window, typically from 300 to 400°C. The implemented sensitive layer is a WO3 film deposed by RF-sputtering. Preliminary tests of gas sensing showed good responses to the target analytes for the specific application (1-heptanol, 3-methyl butanol, benzaldehyde and ethyl-hexanoate).

Citation Download Citation

Andrea Adami, Leandro Lorenzelli, Vittorio Guarnieri, Mario Zen, Luca Francioso, Pietro Siciliano, A. Forleo, A. M. Taurino, and Giuseppe Agnusdei "Microhotplate-based silicon gas sensor arrays with linear temperature gradient for wine quality monitoring", Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); https://doi.org/10.1117/12.608246

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