1 July 2005 PCR device with integrated thermal cycling and fluorescence detection elements
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In this paper, we present both a theoretical evaluation and the fabrication of a novel polymerase chain reaction (PCR) microdevice. This microdevice contains elements for both thermal cycling and fluorescence detection. The proposed device is composed of a reaction chamber with integrated temperature sensor, heaters, p-n diode and optical filter. The advantage of combining these in a single structure is that real time detection of DNA amplification will be possible using a small volume of the PCR solution. The photodiode is covered by a thin film optical filter in order to block out the light which is used to excite the fluorophore dyes. CdS is used for the first time for such a filter and the complete micro-fabrication process is described.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. Bahrami, M. Bahrami, T. Melvin, T. Melvin, J. S. Wilkinson, J. S. Wilkinson, A. G. R. Evans, A. G. R. Evans, } "PCR device with integrated thermal cycling and fluorescence detection elements", Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); doi: 10.1117/12.608646; https://doi.org/10.1117/12.608646


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