1 July 2005 TiNi shape memory alloy based micropumps
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Abstract
Three types of micropumps based on TiNi shape memory alloy thin films were designed and fabricated. The TiNi films were prepared on silicon substrate by co-sputtering TiNi target and a separate Ti target at room temperature, and then post annealed at 650°C. The first pump design is based on a single TiNi/Si bimorph membrane structure with inlet and outlet. The second design is based on three layer structures bonded together, with one TiNi/Si active membrane structure and two layers of check valves. The third design is based on two TiNi/SU-8 composite structures, with TiNi as an actuation element, and SU-8/Si as a spring-back structure. The three types of micropump structures were fabricated based on the conventional MEMS processes.
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Y. Q. Fu, Y. Q. Fu, J. K. Luo, J. K. Luo, M. Hu, M. Hu, H. J. Du, H. J. Du, A. J. Flewitt, A. J. Flewitt, W. I. Milne, W. I. Milne, } "TiNi shape memory alloy based micropumps", Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); doi: 10.1117/12.608506; https://doi.org/10.1117/12.608506
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