8 June 2005 Modification of an EBIC mode in the SEM for imaging of ferroelectric domains
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Proceedings Volume 5851, Fundamental Problems of Optoelectronics and Microelectronics II; (2005) https://doi.org/10.1117/12.634075
Event: Fundamental Problems of Optoelectronics and Microelectronics II, 2004, Khabrovsk, Russian Federation
Abstract
A new mode of imaging of ferroelectric domains in the scanning electron microscope (SEM) has been developed. Like the electron beam induced current (EBIC) mode the sample is covered by thin metal electrodes. The electrons with the incrased energy (10-40 keV) penetrate through a thin electrode and stimulate polarization processes in the bulk of the sample. The electric response is read from the circuit between front and back electrodes. The mechanism of the response forming and the problems of the method resolution are discussed.
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Alexander A. Sogr, Irena B. Kopylova, Anna G. Maslovskaya, "Modification of an EBIC mode in the SEM for imaging of ferroelectric domains", Proc. SPIE 5851, Fundamental Problems of Optoelectronics and Microelectronics II, (8 June 2005); doi: 10.1117/12.634075; https://doi.org/10.1117/12.634075
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