Solid phase growth and properties of Mg2Si epitaxial films on Si(111)

N. G. Galkin; S. V. Vavanova; K. N. Galkin; A. M. Maslov

doi:10.1117/12.634544

8 June 2005 Solid phase growth and properties of Mg₂Si epitaxial films on Si(111)

N. G. Galkin, S. V. Vavanova, K. N. Galkin, A. M. Maslov

Proceedings Volume 5851, Fundamental Problems of Optoelectronics and Microelectronics II; (2005) https://doi.org/10.1117/12.634544
Event: Fundamental Problems of Optoelectronics and Microelectronics II, 2004, Khabrovsk, Russian Federation

Abstract

A technology of solid-phase growth of Mg₂Si thin films from Mg and Si layers on a pre-fabricated template layer of Mg₂Si islands on Si (111) has been developed. The optimum temperature (T=550° C) for growth of epitaxial Mg₂Si films on Si (111) has been found. It has been shown from optical spectroscopy data that Mg₂Si epitaxial film has a direct fundamental transition with the energy of 0.75-0.76 eV with small combined density of states. It represents transition of small number of valence electrons into Mg-Si bonding states in the conductance band. The strong absorption range (1.9-6.2 eV) corresponds to transitions from bonding to anti-bonding states.

Citation Download Citation

N. G. Galkin, S. V. Vavanova, K. N. Galkin, and A. M. Maslov "Solid phase growth and properties of Mg₂Si epitaxial films on Si(111)", Proc. SPIE 5851, Fundamental Problems of Optoelectronics and Microelectronics II, (8 June 2005); https://doi.org/10.1117/12.634544

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available