12 April 2005 Micro/nano grating and its application to moire measurement
Author Affiliations +
Proceedings Volume 5852, Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics; (2005) https://doi.org/10.1117/12.621896
Event: Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics, 2004, -, Singapore
Abstract
In this paper, some novel micro/nano- moire grating fabricating techniques are introduced. The gratings are produced by the SPM lithography, FIB lithography, and molecular beam epitaxy (MBE) method. The moire patterns formed with these gratings are also introduced. The gratings are successfully to be used to measure the residual deformation in the surface around a step edge of the Al/Si artificial nanocluster with the moire methods. The successful experimental results verify the feasibility of these methods.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Huimin Xie, Huimin Xie, Zhanwei Liu, Zhanwei Liu, Haixia Shang, Haixia Shang, Qikun Xue, Qikun Xue, Jinfeng Jia, Jinfeng Jia, Daining Fang, Daining Fang, } "Micro/nano grating and its application to moire measurement", Proc. SPIE 5852, Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics, (12 April 2005); doi: 10.1117/12.621896; https://doi.org/10.1117/12.621896
PROCEEDINGS
5 PAGES


SHARE
Back to Top