The rapid development of microelectromechanical system (MEMS), thin-film and material research in mechanical behaviors has provided new impetus to handle high-precision, full-filed and real-time deformation measurements. Optical methods are very useful in non-contact and full-field measurements of the deformation of an object. However, with the decrease of the dimension of the tested components, the macroscopically testing method and system in existence are not adequate to accurate measurement of the microcomponents. Furthermore, the effect of the small size of view field in the measurement makes the interferometric system hardly producing clear and stable fringe patterns, and then interpretation of the measurement results very difficult. In this paper, a Linnik microinterferometric system has been constructed to measure the full-field deformation of microcomponents. And meanwhile, the phase shifting and temporal speckle pattern interferometry are also introduced to implement the static and dynamic deformation measurements. With the interfermetric system, the characteristic size of the microcomponents can be from sub-millimeters to sever micrometers.