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12 April 2005 Template based nanofabrication: mechanical characterization of film-substrate interface
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Proceedings Volume 5852, Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics; (2005) https://doi.org/10.1117/12.621976
Event: Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics, 2004, -, Singapore
Abstract
This paper presents the results of investigations of thin film alumina templates fabricated on silicon and other substrates. Such templates are of significant interest for the low-cost implementation of semiconductor and metal nanostructure arrays. In addition, thin film alumina templates on silicon have the potential for nanostructure integration with silicon electronics. Formation of thin film alumina templates on silicon substrates was investigated under different fabrication conditions, and the dependence of pore morphology and pore formation rate on process parameters was evaluated. In addition, process conditions for improved pore size distribution and periodicity were determined. The template/silicon interface, important for nanostructure integration on silicon, was investigated using different techniques. Thin film alumina templates on non-silicon substrates such as glass, indium-tin-oxide-coated glass and silicon carbide were also investigated.
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Biswajit Das and Pavan Singaraju "Template based nanofabrication: mechanical characterization of film-substrate interface", Proc. SPIE 5852, Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics, (12 April 2005); doi: 10.1117/12.621976; https://doi.org/10.1117/12.621976
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