12 April 2005 Thermo-mechanical data bit formation of small-sized microcantilever probe tip array
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Proceedings Volume 5852, Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics; (2005); doi: 10.1117/12.621530
Event: Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics, 2004, -, Singapore
Abstract
Unlike the large array of microcantilever design which covers entire recording media area adopted by majority researchers in probe storage, we have designed and fabricated two types of small-sized array of (20X1 and 30X1) microcantilevers, which is driven by an electromagnetic translational actuator to targeted media area, for carrying out recording functions on a relative larger recording media area. This paper presents the prototype of a small-sized microcantilever probe tip array for use in the promising high-density thermo-mechanical data storage technology. Characterization of the microcantilever probe tip such as current versus voltage measurement, thermal time constant measurement and heat emission phenomenon at heater platform were investigated. Preliminary hole indentation or data bit formation results by utilizing the fabricated small-sized microcantilever probe tip array were demonstrated on poly methyl methacrylate (PMMA) recording media.
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Nyok Boon Chong, Jiaping Yang, Jianqiang Mou, Guoxiao Guo, "Thermo-mechanical data bit formation of small-sized microcantilever probe tip array", Proc. SPIE 5852, Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics, (12 April 2005); doi: 10.1117/12.621530; https://doi.org/10.1117/12.621530
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KEYWORDS
Polymethylmethacrylate

Silicon

Actuators

Time metrology

Data storage

Resistance

Thin films

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