Contact CD variation check and contact/metal overlay check using a model based full chip verification software tool

Lantian Wang; Juhwan Kim; Daniel Zhang; Zongwu Tang; Minghui Fan

doi:10.1117/12.617139

28 June 2005 Contact CD variation check and contact/metal overlay check using a model based full chip verification software tool

Lantian Wang, Juhwan Kim, Daniel Zhang, Zongwu Tang, Minghui Fan

Author Affiliations +

Proceedings Volume 5853, Photomask and Next-Generation Lithography Mask Technology XII; (2005) https://doi.org/10.1117/12.617139
Event: Photomask and Next Generation Lithography Mask Technology XII, 2005, Yokohama, Japan

Abstract

Contact and via layers are becoming more critical than before from lithography point of view due to the fact that the contact and via sizes for advanced devices are falling into deep sub-wavelength ranges. In this study, we will demonstrate several different methodologies for contact and via CD variation check and contact/metal overlay checks on the post-opc data using a model based verification software platform. Our study reveals that the full chip verification for the contact and via layers is necessary achievable to guarantee the mask data quality and to prevent catastrophic pattern errors resulting from improper OPC corrections. Good scalability of the software methodology and platform makes it possible to do the full chip verification with reasonable turn around time.

Citation Download Citation

Lantian Wang, Juhwan Kim, Daniel Zhang, Zongwu Tang, and Minghui Fan "Contact CD variation check and contact/metal overlay check using a model based full chip verification software tool", Proc. SPIE 5853, Photomask and Next-Generation Lithography Mask Technology XII, (28 June 2005); https://doi.org/10.1117/12.617139

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