Development of positive-tone chemically amplified resist for LEEPL mask making

Yoshiyuki Negishi; Kazumasa Takeshi; Takashi Yoshii; Keishi Tanaka; Yasuhiro Okumoto

doi:10.1117/12.617283

28 June 2005 Development of positive-tone chemically amplified resist for LEEPL mask making

Yoshiyuki Negishi, Kazumasa Takeshi, Takashi Yoshii, Keishi Tanaka, Yasuhiro Okumoto

Proceedings Volume 5853, Photomask and Next-Generation Lithography Mask Technology XII; (2005) https://doi.org/10.1117/12.617283
Event: Photomask and Next Generation Lithography Mask Technology XII, 2005, Yokohama, Japan

Abstract

We have developed PCARs for LEEPL mask making that has high resolution, good CD uniformity and process stability. The proper choice of resists and the process optimization enabled to form 60nm hole patterns and achieved the local CDU<4.0nm at 80nm hole patterns using the current 50 keV VSB exposure system. The results of the examination about PEB temperature and CD revealed that the CD of small hole patterns was controlled by the quencher diffusion rather than the generated acid diffusion. Defocus issue was also investigated and the sensitivity control of a resist was effectively method against CD error. These results in this report clearly indicate the strategy of the resist development for resolve less than 100nm feature size using EB exposure system.

Citation Download Citation

Yoshiyuki Negishi, Kazumasa Takeshi, Takashi Yoshii, Keishi Tanaka, and Yasuhiro Okumoto "Development of positive-tone chemically amplified resist for LEEPL mask making", Proc. SPIE 5853, Photomask and Next-Generation Lithography Mask Technology XII, (28 June 2005); https://doi.org/10.1117/12.617283

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available