13 June 2005 A focus sensor for an application in a nanopositioning and nanomeasuring machine
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A focus sensor on the basis of a hologram laser unit was developed and successfully tested in a nanopositioning and nanomeasuring machine as a zero indicator. The high resolution of the focus sensor is due to a high-precision optical adjustment and special solutions incorporated into the electronic parts. Thus, any sensor malfunctions caused by back-reflected light inside of the assembly could be completely avoided by means of the special high-frequency modulation and laser power stabilization. Common mode noise reduction provides the high SNR of the output signals. The measurements were made according to a dynamic principle by permanent difference formation between the output signal of the focus sensor and the length value of the z-interferometer of the nanopositioning and nanomeasuring machine. The measuring results are presented, and further possibilities of application are outlined.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rostyslav Mastylo, Rostyslav Mastylo, Denis Dontsov, Denis Dontsov, Eberhard Manske, Eberhard Manske, Gerd Jager, Gerd Jager, } "A focus sensor for an application in a nanopositioning and nanomeasuring machine", Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); doi: 10.1117/12.612887; https://doi.org/10.1117/12.612887


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