Confocal micro-optical distance sensor: principle and design

Aiko K. Ruprecht; Christof Pruss; Hans J. Tiziani; Wolfgang Osten; Peter Lucke; Arndt Last; Jurgen Mohr; Peter Lehmann

doi:10.1117/12.612008

13 June 2005 Confocal micro-optical distance sensor: principle and design

Aiko K. Ruprecht, Christof Pruss, Hans J. Tiziani, Wolfgang Osten, Peter Lucke, Arndt Last, Jurgen Mohr, Peter Lehmann

Proceedings Volume 5856, Optical Measurement Systems for Industrial Inspection IV; (2005) https://doi.org/10.1117/12.612008
Event: Optical Metrology, 2005, Munich, Germany

Abstract

Increasing demands for the monitoring of tolerances of small mechanical and optical precision components require improved measurement techniques. In this paper the basic concept and different optical designs of a confocal microoptical distance-sensor are presented. The sensors use the chromatic-confocal measurement principle which does not require a mechanical depth scan. Therefore, a chromatic-confocal point sensor can be designed without any moving parts. This fact is used to design a miniaturized sensor head with an outer diameter smaller than two millimetres. A special feature of the sensor head is its capability to measure sideways. This enables e.g. to measure surfaces in small drilling holes.

Citation Download Citation

Aiko K. Ruprecht, Christof Pruss, Hans J. Tiziani, Wolfgang Osten, Peter Lucke, Arndt Last, Jurgen Mohr, and Peter Lehmann "Confocal micro-optical distance sensor: principle and design", Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); https://doi.org/10.1117/12.612008

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