13 June 2005 Development and investigation of high resolution resonant pressure sensor with optical interrogation
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In this paper we present a new family of MOEMS device, which can be used as high resolution optical resonant pressure sensor. The architecture contains a membrane loaded with an optical branch of a Mach-Zehnder interferometer (MZI), monolithically integrated on top of a Si substrate. The measuring arm of MZI is crossing the MEMS actuator based on a piezoelectric thin-film PZT transducer integrated on SOI membrane. The PZT transducer is excited by applying a sinusoidal voltage from a waveform generator. The working principle of MZI read-out is based on the change of effective refractive index of guided waves of MZI, induced by displacements of the deformable structure via the elastooptic effect and waveguide elongation. When the membrane operating at resonance frequency, the application of a pressure on the membrane produces a significant shift of resonance frequency corresponding to a loaded pressure. For the characterisation of dynamic characteristic study of microdevices, the advanced testing methods are necessary. The point-wise measurement system was combined with the multifunctional interferometric platform based on Twyman-Green microinterferometer, working in stroboscopic mode. The prototype of the pressure sensor was evaluated and measurement results are presented.
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Michal Jozwik, Michal Jozwik, Christophe Gorecki, Christophe Gorecki, Andrei Sabac, Andrei Sabac, Dominique Heinis, Dominique Heinis, Thierry Dean, Thierry Dean, Alain Jacobelli, Alain Jacobelli, } "Development and investigation of high resolution resonant pressure sensor with optical interrogation", Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); doi: 10.1117/12.612605; https://doi.org/10.1117/12.612605

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