13 June 2005 High-accuracy profile form measurement by a scanning system consisting of an angle sensor and coupled distance sensors
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Abstract
A scanning system consisting of an angle sensor and coupled distance sensors is used for high-accuracy profile form measurements of optical surfaces. This system allows both scanning stage errors and systematic errors of the distance sensors to be estimated. Additionally, a high lateral resolution is achieved. The optical surface profile is reconstructed from the measurements made by the angle and distance sensors by application of least-squares. A test set-up is presented and the results of optical form measurements are shown.
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Joachim Gerhardt, Joachim Gerhardt, Ralf Geckeler, Ralf Geckeler, Michael Schulz, Michael Schulz, Clemens Elster, Clemens Elster, } "High-accuracy profile form measurement by a scanning system consisting of an angle sensor and coupled distance sensors", Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); doi: 10.1117/12.612492; https://doi.org/10.1117/12.612492
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