Modern approaches in phase measuring metrology

James Millerd; Neal Brock; John Hayes; Brad Kimbrough; Matt Novak; Michael North-Morris; James C. Wyant

doi:10.1117/12.621581

13 June 2005 Modern approaches in phase measuring metrology (Invited Paper)

James Millerd, Neal Brock, John Hayes, Brad Kimbrough, Matt Novak, Michael North-Morris, James C. Wyant

Proceedings Volume 5856, Optical Measurement Systems for Industrial Inspection IV; (2005) https://doi.org/10.1117/12.621581
Event: Optical Metrology, 2005, Munich, Germany

Abstract

The measurement accuracy of an interferometric optical test is generally limited by the environment. This paper discusses two single-shot interferometric techniques for reducing the sensitivity of an optical test to vibration; simultaneous phase-shifting interferometry and a special form of spatial carrier interferometry utilizing a micropolarizer phase-shifting array. In both techniques averaging can be used to reduce the effects of turbulence and the normal double frequency errors generally associated with phase-shifting interferometry.

Citation Download Citation

James Millerd, Neal Brock, John Hayes, Brad Kimbrough, Matt Novak, Michael North-Morris, and James C. Wyant "Modern approaches in phase measuring metrology (Invited Paper)", Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); https://doi.org/10.1117/12.621581

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