13 June 2005 Modern approaches in phase measuring metrology (Invited Paper)
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Abstract
The measurement accuracy of an interferometric optical test is generally limited by the environment. This paper discusses two single-shot interferometric techniques for reducing the sensitivity of an optical test to vibration; simultaneous phase-shifting interferometry and a special form of spatial carrier interferometry utilizing a micropolarizer phase-shifting array. In both techniques averaging can be used to reduce the effects of turbulence and the normal double frequency errors generally associated with phase-shifting interferometry.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
James Millerd, James Millerd, Neal Brock, Neal Brock, John Hayes, John Hayes, Brad Kimbrough, Brad Kimbrough, Matt Novak, Matt Novak, Michael North-Morris, Michael North-Morris, James C. Wyant, James C. Wyant, } "Modern approaches in phase measuring metrology (Invited Paper)", Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); doi: 10.1117/12.621581; https://doi.org/10.1117/12.621581
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