Possible application of hyperchromatic optical systems for metrology of surfaces

Jiri Novak; Antonin Miks

doi:10.1117/12.612023

13 June 2005 Possible application of hyperchromatic optical systems for metrology of surfaces

Jiri Novak, Antonin Miks

Proceedings Volume 5856, Optical Measurement Systems for Industrial Inspection IV; (2005) https://doi.org/10.1117/12.612023
Event: Optical Metrology, 2005, Munich, Germany

Abstract

The problems of topography of surfaces are very important in various parts of science and engineering. Several approaches exist for surface figure and roughness measurement. The measurement methods can be divided into two distinct categories, contact and non-contact techniques. Our work describes a relatively simple method for topography measurements that uses special optical systems (hyperchromats) with a linear dependence of longitudinal chromatic aberration on the wavelength of light. The aim of this work is to show a possible application of hyperchromatic optical systems for topography of surfaces. The work describes a basic analysis of parameters of hyperchromats, i.e. optical systems with large longitudinal chromatic aberration that is in our case linearly dependent on the wavelength of light. On the basis of the performed analysis, it can be designed such optical systems (optical sensors) that permit to perform measurements of topography of surfaces, i.e. determine a figure or roughness of surfaces. The sensor uses polychromatic light and relatively simple experimental arrangement. The proposed measurement technique seems to be quite simple and cost effective with respect to other measurement methods.

Citation Download Citation

Jiri Novak and Antonin Miks "Possible application of hyperchromatic optical systems for metrology of surfaces", Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); https://doi.org/10.1117/12.612023

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