13 June 2005 Precision inspection of diameters for circular reflecting cylinders
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Precision noncontact measurement of diameters of circular reflecting cylinders is an actual problem in industry, especially under inspection of rollers of frictionless bearings with their diameters up to 50 mm with measurement error no more than 0.5 μm. We have developed differential Fraunhofer diffraction method, which is appropriate for measurement of such diameters. Peculiarity of this method is rather measurement of gaps between two cylinder vertexes and two reference half-planes, than measurement of cylinder diameter by direct Fraunhofer method. Equivalent model for formation of Fraunhofer diffraction pattern by measurable object is presented. The proposed algorithm for processing of two diffraction patterns from gaps between cylinder vertexes and reference half-planes allows to determine objects diameter with inaccuracy of one- half micron. Experimental results are given.
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Yu. V. Chugui, Yu. V. Chugui, Yu. A. Lemeshko, Yu. A. Lemeshko, "Precision inspection of diameters for circular reflecting cylinders", Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); doi: 10.1117/12.621588; https://doi.org/10.1117/12.621588

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