13 June 2005 The laser-scanning confocal vibrometer microscope
Author Affiliations +
Abstract
Sub-micrometer lateral resolution for the optical vibration measurement can be achieved when the scanned laser beam of a confocal microscope is the measurement beam of a heterodyne laser-Doppler vibrometer. Such a scanning system that allows vibration measurements up to 30 MHz is presented in this paper for the first time. We measured a minimum 1/e2 -power spot diameter of 745 nm and, therefore, the vibration analysis of sub-micrometer mechanical structures is possible with our system. We demonstrate measurements on comb-drive fingers with 2 μm diameter, the tiniest structures available for us.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Christian Rembe, Christian Rembe, Alexander Drabenstedt, Alexander Drabenstedt, } "The laser-scanning confocal vibrometer microscope", Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); doi: 10.1117/12.611996; https://doi.org/10.1117/12.611996
PROCEEDINGS
12 PAGES


SHARE
Back to Top