Optimisation of low-coherence speckle interferometry (LCSI) for characterisation of multi-layered materials

Kay Gastinger; Svein Winther

doi:10.1117/12.613170

26 August 2005 Optimisation of Low-Coherence Speckle Interferometry (LCSI) for characterisation of multi-layered materials

Kay Gastinger, Svein Winther

Author Affiliations +

Proceedings Volume 5858, Nano- and Micro-Metrology; 58580K (2005) https://doi.org/10.1117/12.613170
Event: Optical Metrology, 2005, Munich, Germany

Abstract

In this paper the optical parameters of Low Coherence Speckle Interferometry (LCSI) are analysed in order to optimise the technique and increase the probing depth. The contrast of the interference signal depends on the configuration of the optical setup and the optical properties of the material. Theoretical investigations and measurements for optimising the beam ratio, the coherence function and imaging parameters are presented. By optimising the interference signal the probing depth of the technique can be extended. This is demonstrated for a semi-transparent polymer material. Finally, measurements of the deformation of interfaces in a multi-layered material are presented.

Citation Download Citation

Kay Gastinger and Svein Winther "Optimisation of Low-Coherence Speckle Interferometry (LCSI) for characterisation of multi-layered materials", Proc. SPIE 5858, Nano- and Micro-Metrology, 58580K (26 August 2005); https://doi.org/10.1117/12.613170

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