26 August 2005 Absolute distance measurement using femtosecond laser
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Abstract
Possibilities of using recently-developed femtosecond pulse lasers for advanced precision length metrology are investigated. Special emphasis is placed on the use of femtosecond lasers particularly for absolute distance measurements with sub-micrometer accuracy over extensive ranges. This investigation reveals that femtosecond lasers are capable of providing a suitable means of nanometrology by implementing dispersive comb interferometry in combination with synthetic wavelength interferometry and heterodyne interferometry.
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Seung-Woo Kim, Seung-Woo Kim, Ki-Nam Joo, Ki-Nam Joo, Jonghan Jin, Jonghan Jin, Yun Seok Kim, Yun Seok Kim, } "Absolute distance measurement using femtosecond laser", Proc. SPIE 5858, Nano- and Micro-Metrology, 58580N (26 August 2005); doi: 10.1117/12.612238; https://doi.org/10.1117/12.612238
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