7 October 2005 Fiber optic distance sensor with sub-nm axial resolution
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Abstract
Although the resolution of optical coherence tomography (OCT) has increased in the last years considerably the method is not suited to resolve surface steps in the sub μm range. Based on the Fourier domain OCT principle we present a method to measure distances up to some millimeters with a resolution in the sub nm range. To achieve this resolution the phase of the spectral data is used. The standard deviation of hundred measurements at a distance of approximately 1 mm was 0.1 nm, which is a relative accuracy of 10-7. The system might be used for measuring the attachment of bio molecules on protein chips.
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Edmund Koch, Alexander Popp, Dennis Boller, Hansfrieder Schleiermacher, Peter Koch, "Fiber optic distance sensor with sub-nm axial resolution", Proc. SPIE 5861, Optical Coherence Tomography and Coherence Techniques II, 586114 (7 October 2005); doi: 10.1117/12.632998; https://doi.org/10.1117/12.632998
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