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18 August 2005 Material and application study for low thermal expansion glass-ceramic CLEARCERAM series
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Abstract
Material properties and performances for near future applications were studied for low thermal expansion glass-ceramics; CLEARCERAM series produced by OHARA Inc. In the material study, the improved CTE characteristics of CLEARCERAM-Z HS over conventional CLEARCERAM-Z were shown with interferometric CTE metrology system with 2ppb/degree C repeatability. Also the material uniformity was evaluated by means of refractive index homogeneity. In the application study, the capabilities of CLEARCERAM-Z HS for near future precision applications, Extreme Ultra Violet Lithography (EUVL) system component and extremely large telescope mirror applications were discussed by reviewing actual data prepared in accordance with the existing specifications for each application. For EUVL system component application, inter lot CTE uniformity and surface finish data meeting the SEMI P37 specification were presented and the performance was evaluated. For extremely large telescope mirror application, intra disk uniformity of CTE and stress birefringence for Dia.780mm CLEARCERAM-Z HS meeting mirror blanks specification of existing extremely large telescope project were demonstrated and the potential performance of CLEARCERAM-Z HS for the application was shown with the on-going integration of the size availability at OHARA Inc.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kousuke Nakajima, Toshihide Nakajima, Nobuo Kawasaki, and Yoshiyuki Owari "Material and application study for low thermal expansion glass-ceramic CLEARCERAM series", Proc. SPIE 5868, Optical Materials and Structures Technologies II, 58680T (18 August 2005); https://doi.org/10.1117/12.616070
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