18 August 2005 A new approach to predict computer controlled polishing results
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Abstract
A novel approach to handle and quantify a computer controlled polishing process will be introduced. This approach will be compared to real data. This comparison indicates the correctness of this approach. Based on it a formula has been developed to predict the results of a computer controlled polishing process. The formula will be used to predict real polishing processes and the results will be compared to the real results. The limits when using this formula will be shown along with suggestions when the formula would be useful. This rough prediction of the computer controlled polishing results may be used to enhance the automation of a computer controlled polishing process. Also a way to improve the formula itself will be introduced. It is the opinion of the author that by further stabilizing of the whole computer controlled polishing process the whole system becomes more robust, the prediction more accurate and the whole system improves in reliability and the results become better.
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Elmar Pitschke, Elmar Pitschke, Markus Schinhaerl, Markus Schinhaerl, Andreas Geiss, Andreas Geiss, Peter Sperber, Peter Sperber, Rolf Rascher, Rolf Rascher, Richard Stamp, Richard Stamp, Lyndon Smith, Lyndon Smith, Melvyn Smith, Melvyn Smith, } "A new approach to predict computer controlled polishing results", Proc. SPIE 5869, Optical Manufacturing and Testing VI, 58690H (18 August 2005); doi: 10.1117/12.616780; https://doi.org/10.1117/12.616780
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