22 August 2005 Double optical monitoring of time-dependent film formation
Author Affiliations +
A brief overview of optical monitoring for vacuum and wet bench film deposition processes is presented. Interferometric and polarimetric measurements are combined with regard to simultaneous real-time monitoring of refractive index and physical thickness. Monitor stability and accuracy are verified with transparent oil standards. This double optical technique is applied to dip coating with a multi-component Zirconyl Chloride aqueous solution, whose time varying refractive index and physical thickness curves indicate significant sensitivity to changes of film flow properties during the process.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alexandre F. Michels, Alexandre F. Michels, Thiago Menegotto, Thiago Menegotto, Hans-Peter H. Grieneisen, Hans-Peter H. Grieneisen, Celso V. Santilli, Celso V. Santilli, Flavio Horowitz, Flavio Horowitz, } "Double optical monitoring of time-dependent film formation", Proc. SPIE 5870, Advances in Thin-Film Coatings for Optical Applications II, 58700C (22 August 2005); doi: 10.1117/12.617967; https://doi.org/10.1117/12.617967


Microlayer Topology And Bubble Growth In Nucleate Boiling
Proceedings of SPIE (September 01 1987)
Contactless laser viscometer for flowing liquid films
Proceedings of SPIE (December 09 2005)
Real-time interferometric monitoring of dip coating
Proceedings of SPIE (July 19 1999)
Real-time optical monitoring of the dip coating process
Proceedings of SPIE (October 21 2004)
Some studies on TiO2 films deposited by sol-gel technique
Proceedings of SPIE (August 29 2008)

Back to Top