22 August 2005 Double optical monitoring of time-dependent film formation
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Abstract
A brief overview of optical monitoring for vacuum and wet bench film deposition processes is presented. Interferometric and polarimetric measurements are combined with regard to simultaneous real-time monitoring of refractive index and physical thickness. Monitor stability and accuracy are verified with transparent oil standards. This double optical technique is applied to dip coating with a multi-component Zirconyl Chloride aqueous solution, whose time varying refractive index and physical thickness curves indicate significant sensitivity to changes of film flow properties during the process.
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Alexandre F. Michels, Thiago Menegotto, Hans-Peter H. Grieneisen, Celso V. Santilli, Flavio Horowitz, "Double optical monitoring of time-dependent film formation", Proc. SPIE 5870, Advances in Thin-Film Coatings for Optical Applications II, 58700C (22 August 2005); doi: 10.1117/12.617967; https://doi.org/10.1117/12.617967
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