Paper
19 August 2005 Low-loss gratings for next-generation gravitational wave detectors
T. Clausnitzer, E.-B. Kley, A. Tuennermann, A. Bunkowski, O. Burmeister, K. Danzmann, R. Schnabel, A. Duparre, S. Gliech
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Abstract
By combining electron beam lithography with coating processes, very shallow gratings with diffraction efficiencies between 0.02% and 7% have been realized. Advantages and disadvantages of different layout concepts for such gratings, their fabrication regime and measurements of their scattering will be discussed. The application of such gratings as coupling components to a reflective Fabry-Perot cavity resulted in a finesse of more than 400.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
T. Clausnitzer, E.-B. Kley, A. Tuennermann, A. Bunkowski, O. Burmeister, K. Danzmann, R. Schnabel, A. Duparre, and S. Gliech "Low-loss gratings for next-generation gravitational wave detectors", Proc. SPIE 5870, Advances in Thin-Film Coatings for Optical Applications II, 58700J (19 August 2005); https://doi.org/10.1117/12.617334
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Cited by 1 scholarly publication and 1 patent.
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KEYWORDS
Diffraction gratings

Diffraction

Scattering

Coating

Mirrors

Reflectivity

Dielectrics

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