18 August 2005 Advances in interferometric surface metrology
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Abstract
Optical interferometry is being used more and more to solve metrology problems. It is important in giving an insight into the properties of the top surface whether it is a processed surface or a thin film coating This paper will discuss metrology issues and ways in which to solve them using autocorrelation. Autocorrelation now commonly used to extract spatial information from surface profiles. It is suitable for looking at processing issues and identifying any periodic errors. An example showing the use of autocorrelation to solve process issues in diamond turning is shown.
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Mike Conroy, Mike Conroy, Joe Armstrong, Joe Armstrong, Ian Lee-Bennett, Ian Lee-Bennett, "Advances in interferometric surface metrology", Proc. SPIE 5872, Advancements in Polymer Optics Design, Fabrication, and Materials, 587208 (18 August 2005); doi: 10.1117/12.621576; https://doi.org/10.1117/12.621576
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