1 August 2005 Evolution of catadioptric scan optics for wide-field high-resolution applications
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Abstract
Most high resolution scanning applications use a rotationally symmetric scan lens and precision motor polygon mirror assemblies or active facet error correction. The realm of passive motion compensation and low-cost motor polygon assemblies tend to be limited to lower-performance systems. The reason for this lies in the symmetry that is broken by tangential beam input to the rotating polygon mirror. An alternative design method is presented, along with examples of application for UV maskless lithography.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John M. Tamkin, John M. Tamkin, } "Evolution of catadioptric scan optics for wide-field high-resolution applications", Proc. SPIE 5873, Optical Scanning 2005, (1 August 2005); doi: 10.1117/12.618364; https://doi.org/10.1117/12.618364
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