26 August 2005 A novel method for fabrication of continuous-relief optical elements
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A novel method for the fabrication of continuous micro-optical components is presented in this paper. It employs a computer controlled spatial-light-modulator (SLM) as a switchable projection mask and silver-halide sensitized gelatin (SHSG) as recording material. By etching SHSG with enzyme solution, the micro-optical components with relief modulation can be generated through special processing procedures. The principles of digital SLM-based lithography and enzyme etching SHSG are discussed in detail, and microlens arrays, micro axicon-lens arrays and gratings with good profile were achieved. This method is simple, cheap and the aberration in processing procedures can be in-situ corrected in the step of designing mask, so it is a practical method to fabricate continuous profile for low-volume production.
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Xiaowei Guo, Xiaowei Guo, Jinglei Du, Jinglei Du, Mingyong Chen, Mingyong Chen, Yanqin Ma, Yanqin Ma, Jianhua Zhu, Jianhua Zhu, Qinjun Peng, Qinjun Peng, Yongkang Guo, Yongkang Guo, Chunlei Du, Chunlei Du, "A novel method for fabrication of continuous-relief optical elements", Proc. SPIE 5874, Current Developments in Lens Design and Optical Engineering VI, 58740S (26 August 2005); doi: 10.1117/12.619598; https://doi.org/10.1117/12.619598

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