9 September 2005 Highly stable six-axis alignment mechanism
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Proceedings Volume 5877, Optomechanics 2005; 58770N (2005) https://doi.org/10.1117/12.619297
Event: Optics and Photonics 2005, 2005, San Diego, California, United States
Abstract
One of the major challenges for typical opto-mechanical assemblies is that they require multiple degrees of freedom with large travel (several millimeters) but very small (sub-micron) resolution. After adjustment, assemblies must be stable to a few nanometers to survive environmental and mechanical shock over a lifetime of use. Using parts with engineered mating surfaces, we have developed a low-cost and robust set of components with demonstrated sub-50-nm adjustment resolution and comparable stability after multiple environmental stress events. For this work, we have adopted -30 to +70 C temperature cycling and 10 G (15 ms) half-sine shock as our environmental qualification standards. We apply the methodologies of reliability testing learned for Telcordia qualification of passive fiber optic components to opto-mechanical components and assemblies for capital equipment instruments. Demonstration of sub-50-nm resolution and stability for our developed opto-mechanical components requires a suitable test stand, which we have developed using scanning knife-edge beam profilers and a highly-repeatable kinematic loading base with a built-in reference. We use these test results to develop system error budgets in design and manufacture based on component, assembly, and measurement tolerances. The developed opto-mechanical assemblies have been demonstrated to have sub-50 nm stability in laboratory and field tests.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Evan Green, Evan Green, Bing Zheng, Bing Zheng, Alejandro Farinas, Alejandro Farinas, Dave Arnone, Dave Arnone, "Highly stable six-axis alignment mechanism", Proc. SPIE 5877, Optomechanics 2005, 58770N (9 September 2005); doi: 10.1117/12.619297; https://doi.org/10.1117/12.619297
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