30 August 2005 3D surface profilometry for both static and dynamic nanoscale full field characterization of AFM micro cantilever beams
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Abstract
A static and dynamic 3-D surface profilometer with nano-scale measurement resolution was successfully developed using stroboscopic illumination and white-light vertical scanning techniques. Microscopic interferometry is a powerful technique for static and dynamic characterization of micro electromechanical systems (MEMS). As MEMS devices move rapidly towards commercialization, the issue of accurate dynamic characterization has emerged as a major challenge in design and fabrication. In view of this need, an interferometric microscopy based on white-light stroboscopic interferometry using vertical scanning principle was developed to achieve static and dynamic full-field profilometry and characterization of MEMS devices. A micro cantilever beam used in AFM was characterized using the developed instrument to analyze its full-field resonant vibratory behavior. The first five mode resonant vibration can be fully characterized and 3-5 nm of vertical measurement accuracy as well as tens micrometers of vertical measurement range can be achieved. The experimental results were consistent with the theoretical simulation outcomes from ANSYS. Using white-light stroboscopic illumination and white-light vertical scanning techniques, our approach has demonstrated that static and dynamic 3-D nano-scale surface profilometry of MEMS devices with tens-micrometer measurement range and a dynamic bandwidth up to 1MHz resonance frequency can be achieved.
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Liang-Chia Chen, Kuang-Chao Fan, Chi-Duen Lin, Calvin C. Chang, Ching-Fen Kao, Jung-Tsung Chou, "3D surface profilometry for both static and dynamic nanoscale full field characterization of AFM micro cantilever beams", Proc. SPIE 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II, 587804 (30 August 2005); doi: 10.1117/12.614683; https://doi.org/10.1117/12.614683
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