18 August 2005 Uncertainties in aspheric profile measurements with the geometry measuring machine at NIST
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Abstract
The Geometry Measuring Machine (GEMM) of the National Institute of Standards and Technology (NIST) is a profilometer for free-form surfaces. A profile is reconstructed from local curvature of a test part surface, measured at several locations along a line. For profile measurements of free-form surfaces, methods based on local part curvature sensing have strong appeal. Unlike full-aperture interferometry they do not require customized null optics. The uncertainty of a reconstructed profile is critically dependent upon the uncertainty of the curvature measurement and on curvature sensor positioning. For an instrument of the GEMM type, we evaluate the measurement uncertainties for a curvature sensor based on a small aperture interferometer and then estimate the uncertainty in the reconstructed profile that can be achieved. In addition, profile measurements of a free-form mirror, made with GEMM, are compared with measurements using a long-trace profiler, a coordinate measuring machine, and subaperture-stitching interferometry.
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Ulf Griesmann, Ulf Griesmann, Nadia Machkour-Deshayes, Nadia Machkour-Deshayes, Johannes Soons, Johannes Soons, Byoung Chang Kim, Byoung Chang Kim, Quandou Wang, Quandou Wang, John R. Stoup, John R. Stoup, Lahsen Assoufid, Lahsen Assoufid, } "Uncertainties in aspheric profile measurements with the geometry measuring machine at NIST", Proc. SPIE 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II, 58780D (18 August 2005); doi: 10.1117/12.615398; https://doi.org/10.1117/12.615398
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