31 August 2005 New configuration of channeled spectropolarimeter for snapshot polarimetric measurement of materials
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A novel configuration for the channeled spectroscopic ellipsometer (CSE) is presented. The channeled spectroscopic ellipsometry is a snapshot method for the spectrally-resolved polarization analysis. In this method, multiple-order retarders are utilized to generate a channeled spectrum carrying information about the wavelength-dependent multiple parameters of polarization of light. This method has a feature that it requires no mechanical or active components for polarization-control, such as a rotating compensator and an electro-optic modulator. In spite of these advantages, however, the previously proposed configuration of the CSE has a drawback that it is susceptible to the ray-direction variation introduced by the angular fluctuation of the ellipsometric sample. To overcome this drawback, an alternative configuration for the CSE has been developed. In this configuration, the multiple-order retarders are inserted between a light source and a sample, so that the measured results are not affected by the fluctuations due to the reflection from the sample. A compact sensing head whose size is 160mm(W)×53mm(H)×30mm(D) was realized using the new configuration, and applied for the snapshot measurement of the SiO2 films deposited on a Si substrate, with the acquisition time of 20 ms. The measured thicknesses of the SiO2 films are almost agree with the results from the rotating-compensator ellipsometer. The configuration that has the multiple-order retarders in the polarization-generating section can apply to other spectroscopic polarimeters to remove the influence of the ray-direction fluctuations due to the reflection or transmission from the sample.
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Hiroshi Okabe, Hiroshi Okabe, Kenichi Matoba, Kenichi Matoba, Masayuki Hayakawa, Masayuki Hayakawa, Atsushi Taniguchi, Atsushi Taniguchi, Kazuhiko Oka, Kazuhiko Oka, Hitoshi Naito, Hitoshi Naito, Nobuo Nakatsuka, Nobuo Nakatsuka, } "New configuration of channeled spectropolarimeter for snapshot polarimetric measurement of materials", Proc. SPIE 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II, 58780H (31 August 2005); doi: 10.1117/12.616298; https://doi.org/10.1117/12.616298

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