18 August 2005 Thin film thickness determination using reflected spectrum sampling
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Abstract
This paper discusses an innovation in reflectometry that presents cost and implementation advantages over configurations currently in use. We demonstrate that the semi-continuous wavelength spectrum used by a spectroscopic reflectometer can be replaced with a small set of fixed wavelength optical sources with only a small loss in measurement accuracy. The resulting instrumentation is called a spectrum sampling reflectometer (SSR). Spectrum sampling can be achieved using inexpensive LEDs and/or lasers as the optical sources. Theoretical calculations for instrument accuracy are shown for both LEDs and lasers along with experimental data from a prototype system using LEDs.
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Justin Henrie, Justin Henrie, Stephen M. Schultz, Stephen M. Schultz, Aaron R. Hawkins, Aaron R. Hawkins, } "Thin film thickness determination using reflected spectrum sampling", Proc. SPIE 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II, 58780I (18 August 2005); doi: 10.1117/12.613197; https://doi.org/10.1117/12.613197
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