18 August 2005 Thin film thickness determination using reflected spectrum sampling
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Abstract
This paper discusses an innovation in reflectometry that presents cost and implementation advantages over configurations currently in use. We demonstrate that the semi-continuous wavelength spectrum used by a spectroscopic reflectometer can be replaced with a small set of fixed wavelength optical sources with only a small loss in measurement accuracy. The resulting instrumentation is called a spectrum sampling reflectometer (SSR). Spectrum sampling can be achieved using inexpensive LEDs and/or lasers as the optical sources. Theoretical calculations for instrument accuracy are shown for both LEDs and lasers along with experimental data from a prototype system using LEDs.
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Justin Henrie, Stephen M. Schultz, Aaron R. Hawkins, "Thin film thickness determination using reflected spectrum sampling", Proc. SPIE 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II, 58780I (18 August 2005); doi: 10.1117/12.613197; https://doi.org/10.1117/12.613197
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