Surface texture investigation of ultra-precision optical components

Sven Schroeder; Juliane Ratteit; Stefan Gliech; Angela Duparre

doi:10.1117/12.616500

31 August 2005 Surface texture investigation of ultra-precision optical components

Sven Schroeder, Juliane Ratteit, Stefan Gliech, Angela Duparre

Proceedings Volume 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II; 587813 (2005) https://doi.org/10.1117/12.616500
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

To meet the ever increasing requirements for high quality optical surfaces, components and systems, high-sensitive and flexible analysis of optical losses, nano-roughness and defects is necessary. In this paper, we present the set-ups developed at the Fraunhofer Institute in Jena for total and angle resolved scattering measurements from the VUV and VIS up to the IR spectral regions. Examples are presented for light scattering investigations of the texture of ultraprecision mirrors produced by diamond turning. Experiments are described which were carried out to test the possibilities for nano- and micro defect detection using these set-ups. Furthermore, the relationship between the scattering properties of dielectric multilayer mirrors and their interface texture is discussed for highly reflective DUV mirrors.

Citation Download Citation

Sven Schroeder, Juliane Ratteit, Stefan Gliech, and Angela Duparre "Surface texture investigation of ultra-precision optical components", Proc. SPIE 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II, 587813 (31 August 2005); https://doi.org/10.1117/12.616500

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