18 August 2005 Phase-shifting laser diode interferometry with equal phase steps using a Fabry-Perot cavity
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Abstract
A phase-shifting interferometer (PSI) with equal phase steps, using a frequency-tunable diode laser and a Fabry-Perot cavity, is proposed for the Carre algorithm. The measurement accuracy of the Carre algorithm depends on the equality of the phase steps. Using the Fabry-Perot cavity as a highly stable optical frequency reference, a high degree of phase step equality can be realized in the PSI with an optical frequency shift. Our experimental scheme realizes an optical frequency step equality higher than 2.1×10-5 and a measurement repeatability of λ/850.
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Youichi Bitou, Youichi Bitou, Hajime Inaba, Hajime Inaba, Feng-Lei Hong, Feng-Lei Hong, Toshiyuki Takatsuji, Toshiyuki Takatsuji, Atsushi Onae, Atsushi Onae, } "Phase-shifting laser diode interferometry with equal phase steps using a Fabry-Perot cavity", Proc. SPIE 5879, Recent Developments in Traceable Dimensional Measurements III, 58790Y (18 August 2005); doi: 10.1117/12.613881; https://doi.org/10.1117/12.613881
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