18 August 2005 Development of a two-dimensional nano-displacement measuring system utilizing a combined optical and x-ray interferometer
Author Affiliations +
Abstract
We have developed a two-dimensional nano-displacement measuring system utilizing a combined optical and x-ray interferometer (COXI). The system consists of optical interferometers for two-dimensional displacements and an x-ray interferometer. The x-ray interferometer was used to calibrate the non-linearity of the optical interferometers. The x-ray interferometer can subdivide the optical interference signal with 0.2 nm linear scales. The measured non-linearity of the heterodyne optical interferometer was less than 2 nm. The calibrated optical interferometers were used to measure two dimensional nanoscale displacements, and the accuracy of the optical interferometers was reduced to sub-nanometer after the compensation. To demonstrate the application of the system, we have measured the non-linearity of capacitive sensors using the calibrated optical interferometers.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jinwon Park, Jinwon Park, Jaegeun Jo, Jaegeun Jo, Sangho Byun, Sangho Byun, Cheon Il Eom, Cheon Il Eom, } "Development of a two-dimensional nano-displacement measuring system utilizing a combined optical and x-ray interferometer", Proc. SPIE 5879, Recent Developments in Traceable Dimensional Measurements III, 587912 (18 August 2005); doi: 10.1117/12.619174; https://doi.org/10.1117/12.619174
PROCEEDINGS
8 PAGES


SHARE
Back to Top