Linearity improvement of lateral effect position sensitive devices

Song Cui; Ying Zhang; Yeng Chai Soh; Changyun Wen

doi:10.1117/12.615893

7 September 2005 Linearity improvement of lateral effect position sensitive devices

Song Cui, Ying Zhang, Yeng Chai Soh, Changyun Wen

Proceedings Volume 5881, Infrared and Photoelectronic Imagers and Detector Devices; 588107 (2005) https://doi.org/10.1117/12.615893
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

In this paper, a linearity index is proposed to assess the performance of the position measurement of using position sensitive devices (PSDs). Using the index, a set of position measurement formulae is proposed for PSD with tetra-lateral structures. Compared to the conventional results, the proposed measurement formulae have improved the area with distortion less than 1% from the currently best result of 13% to 25%. Simulation results are reported to verify the theoretical analysis.

Citation Download Citation

Song Cui, Ying Zhang, Yeng Chai Soh, and Changyun Wen "Linearity improvement of lateral effect position sensitive devices", Proc. SPIE 5881, Infrared and Photoelectronic Imagers and Detector Devices, 588107 (7 September 2005); https://doi.org/10.1117/12.615893

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